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Rhenium Heptoxide,Cobalt Iron Boron Sputtering Target
Appearance: Yellow crystal granule
Chemical Specification: Re2O7≥99.99% Re≥76.87% , impurities <100ppm
Typical chemical analysis
| Impurities Trace impurities(%,max) | |||||||
| Element | Value | Element | Value | Element | Value | Element | Value |
| K | 0.0004 | Na | 0.0002 | Ca | 0.0003 | Fe | 0.0015 |
| W | 0.0002 | Mn | 0.0002 | Cu | 0.0003 | Cr | 0.0010 |
| Zn | 0.0002 | Al | 0.0003 | Mg | 0.0002 | Mo | 0.0004 |
| Ti | 0.0002 | Ni | 0.0002 | V | 0.0002 | Si | 0.0015 |
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